Euv Python Packages

euv-snapshot-imaging-spectrograph

A Python library for interpreting images of the Sun captured by NASA's EUV Snapshot Imaging Spectrograph (ESIS).

ctis

A Python library for analyzing and simulating observations from computed tomography imaging spectrographs (CTIS).

openlithohub

Open-source computational lithography workflow, manufacturability benchmarking, and foundation model data engine for advanced EUV/curvilinear mask processes

ocdb

Python package to access optical constants of elements and various materials in the EUV and VUV wavelengths.

openuv

Open-source EUV lithography simulator in Python/PyTorch: Mo/Si mirror, thin-mask and RCWA mask diffraction, partially coherent imaging, chemically amplified resist (Dill, PEB, development) with stochastic LER/LWR, process window and calibration. Every physical default has a named source. Browser GUI and REST API. Apache-2.0.